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Влияние температуры отжига и толщины пленки Ni/Ti, полученной магнетронным напылением, на ее микроструктуру и поведение при наноиндентировании

Судхансу Патро, Кулдип Кумар Саксена, Аджит Бехера

Аннотация


Исследована зависимость микроструктуры и механических свойств от толщины покрытий Ni/Ti, полученных на подложке Si(100) методом магнетронного напыления, и температуры последующего отжига. Измерены толщина и шероховатость поверхности покрытий с использованием профилометрии и атомно-силовой микроскопии. Методом наноиндентирования определены сопротивление проникновению индентора, твердость и модуль Юнга. Установлено, что что наиболее высокими механическими свойствами обладают слои минимальной толщины. Повышение температуры отжига, проводимого после напыления, способствует постепенному торможению процесса укрупнения атомных кластеров и улучшению механических свойств слоя.

Ключевые слова


NiTi; магнетронное распыление; отжиг; температура; кремний; тонкие пленки.

Полный текст:

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Литература


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DOI: https://doi.org/10.30906/mitom.2023.3.40-45

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